Title:
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/024777
Kind Code:
A1
Abstract:
Disclosed is a vacuum processing apparatus which comprises: a processing chamber (3) in which an object to be processed is placed and a predetermined vacuum state is formed; a first processing gas introducing means (12) for converting a first processing gas into a radical state and introducing the resulting processing gas into the processing chamber through a first processing gas feed port that is opened to the inside of the processing chamber; a second processing gas introducing means (15) for introducing a second processing gas, which is reactive with the first processing gas in a radical state, into the processing chamber through a second processing gas feed port that is opened to the inside of the processing chamber; a temperature controlling means for controlling the temperature within the processing chamber (3) to a first temperature-controlled state, in which the first processing gas in a radical state and the second processing gas process the surface of the object to be processed and produce a reaction product, and to a second temperature-controlled state, in which the thus-produced reaction product is sublimated and removed; and an inert gas introducing means for introducing an inert gas into the processing chamber (3) through the first processing gas introducing means (12) when the temperature controlling means controls the temperature within the processing chamber (3) to the second temperature-controlled state.
Inventors:
ONO YOUHEI (JP)
KAWANA MASAAKI (JP)
MIURA YUTAKA (JP)
KAWANA MASAAKI (JP)
MIURA YUTAKA (JP)
Application Number:
PCT/JP2010/064220
Publication Date:
March 03, 2011
Filing Date:
August 24, 2010
Export Citation:
Assignee:
ULVAC INC (JP)
ONO YOUHEI (JP)
KAWANA MASAAKI (JP)
MIURA YUTAKA (JP)
ONO YOUHEI (JP)
KAWANA MASAAKI (JP)
MIURA YUTAKA (JP)
International Classes:
H01L21/3065; H05H1/24
Foreign References:
| JP2005203409A | 2005-07-28 | |||
| JP2007538397A | 2007-12-27 | |||
| JP2005203404A | 2005-07-28 |
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
Hiroyuki Kurihara (JP)
Hiroyuki Kurihara (JP)
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