VACUUM PROCESSING DEVICE AND MASS ANALYZING DEVICE

Title:

VACUUM PROCESSING DEVICE AND MASS ANALYZING DEVICE

Document Type and Number:

WIPO Patent Application WO/2017/085874

Kind Code:

A1

Abstract:

The present invention reduces the amount of time required for the operation of moving an object between a load lock chamber and a processing chamber, and isolating the load lock chamber and the processing chamber. This vacuum processing device (1) is provided with: a processing chamber (3) capable of establishing a vacuum state in the interior thereof; a load lock chamber (2) connected to the processing chamber (3) and capable of switching between an ambient atmosphere state and a vacuum state; a communication part (10) that allows communication between the processing chamber (3) and the load lock chamber (2); a stage (5) which is capable of moving between the processing chamber (3) and the load lock chamber (2) through the communication part (10), and on which an object to be processed is mounted; and a sealing part (6) fixed to the stage (5) and larger than an opening at the processing chamber (3) side of the communication part (10).

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Inventors:

MATSUSHITA TOMOYOSHI (GB)

Application Number:

PCT/JP2015/082743

Publication Date:

May 26, 2017

Filing Date:

November 20, 2015

Export Citation:

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Assignee:

KRATOS ANALYTICAL LTD (GB)
MATSUSHITA TOMOYOSHI (GB)

International Classes:

H01J49/04; G01N27/62

Foreign References:

JPH03288429A

1991-12-18

Other References: