Title:
VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/230592
Kind Code:
A1
Abstract:
The purpose of the present invention is, in a pass-through type vacuum processing device that uses a plurality of substrate holders, to perform processing on both surfaces of substrates with excellent efficiency, and achieve reduction in size and simplification in constitution of the device. A transport path has an outbound path side transport unit 33a for transporting each of the substrate holders 11 in a first transport direction P1 in a horizontal state, a return path side transport unit 33c for transport in a second transport direction P2 reverse of the first transport direction P1, and a transport turning unit 30B for turning from the outbound path side transport unit 33a to the return path side transport unit 33c. The substrate holders 11 are transported by a first drive unit 36 of a substrate holder transport mechanism 3. A direction switching mechanism 40 having a second drive unit 46 is provided in proximity to the transport turning unit 30B. The first drive unit 36 of the substrate holder transport mechanism 3 and the second drive unit 46 of the direction switching mechanism 40 are made to operate synchronously, and the substrate holders 11 are each passed over from the outbound path side transport unit 33a to the return path side transport unit 33c in a state maintaining an upper side/lower side relationship by guiding and transporting the first and second driven shafts 12, 13 along first and second direction switching paths 51, 52 of the direction switching mechanism 40.
Inventors:
MATSUZAKI JUNSUKE (JP)
TAKAHASHI HIROHISA (JP)
MIZUSHIMA YUU (JP)
TAKAHASHI HIROHISA (JP)
MIZUSHIMA YUU (JP)
Application Number:
PCT/JP2018/022529
Publication Date:
December 20, 2018
Filing Date:
June 13, 2018
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
C23C14/56; H01L21/677
Domestic Patent References:
| WO2017104826A1 | 2017-06-22 | |||
| WO2018084286A1 | 2018-05-11 |
Foreign References:
| JPS5554569A | 1980-04-21 | |||
| JP2007031821A | 2007-02-08 | |||
| JP2013207140A | 2013-10-07 |
Attorney, Agent or Firm:
ABE Hideki et al. (JP)
Download PDF: