Title:
VACUUM PUMP, BLADE COMPONENT AND ROTOR FOR USE IN VACUUM PUMP, AND FIXED BLADE
Document Type and Number:
WIPO Patent Application WO/2018/174013
Kind Code:
A1
Abstract:
[Problem] To provide: a vacuum pump that can effectively prevent backflow of particles from the vacuum pump to a vacuum chamber, without the gas molecule exhaust performance of the vacuum pump being impaired, and that is ideal for preventing contamination of the inside of the vacuum chamber by backflow particles; a blade component and a rotor for use in the vacuum pump; and a fixed blade. [Solution] A vacuum pump that has, between an intake port and an exhaust port, a plurality of exhaust stages PT that function as means for expelling gas molecules. Between the intake port and an uppermost exhaust stage PT (PT1) of the plurality of exhaust stages PT, the vacuum pump has, as particle transport means that transport particles in the direction in which the gas molecules are expelled, blades NB that: rotate with rotary blades 7 (71, 75) that constitute the uppermost exhaust stage PT1; and number fewer than the rotary blades 7 that constitute the uppermost exhaust stage PT1.
Inventors:
NONAKA MANABU (JP)
ENOSAWA HIDEKI (JP)
ENOSAWA HIDEKI (JP)
Application Number:
PCT/JP2018/010835
Publication Date:
September 27, 2018
Filing Date:
March 19, 2018
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
JP2000337290A | 2000-12-05 | |||
JP2010174779A | 2010-08-12 | |||
JP2006511758A | 2006-04-06 | |||
JPH05272488A | 1993-10-19 | |||
US20100266426A1 | 2010-10-21 | |||
JP5463037B2 | 2014-04-09 |
Other References:
See also references of EP 3604820A4
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