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Title:
VACUUM PUMP AND CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/044674
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump and a control device with which highly precise and stable control can be performed during steady operation, and in which the vacuum pump withstands disturbance, the pump stop time is brief, and the pump can be reduced in size. [Solution] Positional deviation calculated by a subtracter 1 is inputted to PIDs 22, 32, 42, which are in three modes. The PID 22 is a PID regulator for a high-bias mode, the PID 32 is a PID regulator for a high-rigidity mode, and the PID 42 is a PID regulator for a low-rigidity mode. An output signal of the PID 42 is extracted as the amount of change of an indicator current with each clock of a PWM frequency, and is designed such that an average value ΔC of the amount of change of the indicator current among several clocks is acquired in a calculation unit 41. A switching control unit 45 computes whether or not the magnitude of the average value ΔC of the amount of change of the indicator current averaged in this case is greater than a prescribed value set in advance, and in accordance with the result of computation, an α value is outputted from the switching control unit 45 in a range of 0-1.

Inventors:
EZAWA Yoshimasa (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
FUKAMI Hideo (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
SATO Kou (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
Application Number:
JP2018/031269
Publication Date:
March 07, 2019
Filing Date:
August 24, 2018
Export Citation:
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Assignee:
EDWARDS JAPAN LIMITED (1078-1, Yoshihashi Yachiyo-shi Chiba, 23, 〒2768523, JP)
International Classes:
F04D19/04; F16C32/04
Foreign References:
JPH1037958A1998-02-13
JP2013130180A2013-07-04
JP2005290998A2005-10-20
JP2005502004A2005-01-20
JP2000283159A2000-10-13
JP2004150628A2004-05-27
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