Title:
VACUUM PUMP AND VACUUM PUMP CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/159855
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that can efficiently cool an electrical apparatus. [Solution] The present invention comprises: a pump main body 11; and an electrical apparatus case 31 that is arranged on the outside of the pump main body 11. The electrical apparatus case 31 has: a cooling jacket 36 that has a cooling medium flow path 38a formed therein; and a power source circuit part 33 that comprises a circuit component 62 and can be cooled by the cooling jacket 36. The power source circuit part 33 is attached to the cooling jacket 36 such that heat can be transferred therebetween. The cooling jacket 36 comprises: a jacket main body 37; and a cooling tube 38 that is for circulating cooling water inside the jacket main body 37. The cooling tube 38 is partially exposed toward the power source circuit part 33 side.
Inventors:
SUN YANBIN (JP)
SAEGUSA KENGO (JP)
SAEGUSA KENGO (JP)
Application Number:
PCT/JP2019/004745
Publication Date:
August 22, 2019
Filing Date:
February 08, 2019
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F04B37/16; F04B39/00; F04B39/06
Domestic Patent References:
| WO2011111209A1 | 2011-09-15 |
Foreign References:
| JP2014043827A | 2014-03-13 | |||
| JP2013100760A | 2013-05-23 | |||
| JP2008244062A | 2008-10-09 | |||
| JP2017200314A | 2017-11-02 |
Other References:
See also references of EP 3754203A4
Download PDF: