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Title:
VACUUM PUMP AND VACUUM PUMP CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/202905
Kind Code:
A1
Abstract:
[PROBLEM] To provide a vacuum pump that can determine the rotation direction and correct the rotation direction without the addition of a dedicated rotation-direction sensor, even if the pump is in a low-speed rotation state. [SOLUTION] The present invention can be in at least: a first state, in which a rotor shaft 21 performs relatively high-speed rotation; and a second state, in which the rotor shaft 21 performs relatively low-speed rotation whilst revolving at an offset within the range of the gap H between the shaft and a protection bearing 36. Output information is obtained from a radial-direction displacement sensor, and in the second state, the rotation direction of the rotor shaft 21 is determined based on the output information, and the rotation direction is determined to be correct or not. If the rotation direction is not correct, the rotation is stopped, and the rotation speed towards the correct rotation direction is increased.

Inventors:
FUKAMI Hideo (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
OHTACHI Yoshinobu (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
MAEJIMA Yasushi (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
TAKAADA Tsutomu (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
Application Number:
JP2019/011929
Publication Date:
October 24, 2019
Filing Date:
March 20, 2019
Export Citation:
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Assignee:
EDWARDS JAPAN LIMITED (1078-1, Yoshihashi Yachiyo-shi Chiba, 23, 〒2768523, JP)
International Classes:
F04D19/04
Foreign References:
JP2013185578A2013-09-19
JP2012193705A2012-10-11
US6050782A2000-04-18
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