Title:
VACUUM PUMP AND CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/145292
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump and a control device with which: cost reduction and space saving are achieved by performing heater control of piping, which is performed to suppress the precipitation of deposits from a process gas, and performing, on a pump side, cooling control of a depot trap in which deposit removal is performed; and performing heater control and cooling control according to conditions of the process gas leads to energy saving. [Solution] A temperature sensor is arranged on the outer periphery or inner periphery of an introduction pipe 3H, and temperature information 31 detected by the temperature sensor is inputted to a control device 200. Temperature information 33 detected from the interior of a depot trap 7 is also inputted to the control device 200. In the control device 200, a heater 4B is controlled to turn on and off so that the temperature of the introduction pipe 3H reaches a predetermined temperature value on the basis of the inputted temperature information 31. In the control device 200, a valve 13 is controlled to open and close so that the temperature of the interior of the depot trap 7 reaches a predetermined cooling temperature value on the basis of the inputted temperature information 33.
Inventors:
YOSHINO SHINICHI (JP)
TAKEDA MASAYUKI (JP)
MIYASAKA NAOKI (JP)
TAKEDA MASAYUKI (JP)
MIYASAKA NAOKI (JP)
Application Number:
PCT/JP2021/047364
Publication Date:
July 07, 2022
Filing Date:
December 21, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2007113455A | 2007-05-10 | |||
| JPH09317688A | 1997-12-09 | |||
| JP2018040277A | 2018-03-15 | |||
| JPH0878300A | 1996-03-22 | |||
| JP2000249058A | 2000-09-12 |
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