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Patent Searching and Data


Title:
VACUUM PUMP AND DAMPER FOR VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2019/181705
Kind Code:
A1
Abstract:
Provided are a vacuum pump and a damper for a vacuum pump having a simple structure and capable of enhancing vibration isolation in a twisting direction, and capable of preventing breaking of and damage to an O-ring and a resilient body by restricting displacement between opposing flanges. This vacuum pump is provided with a first flange (13) and a second flange (14) displaced facing one another and having an annular shape, an intermediate ring (15) disposed between the first flange (13) and the second flange (14), O-rings (16) disposed between the first flange (13) and the intermediate ring (15) and between the intermediate ring (15) and the second flange (14), a plurality of resilient bodies (17) disposed at various points in the circumferential direction of a central opening (13a, 14a), between the first flange (13) and the second flange (14), and a hermetic holding means (51) including positioning pins (41) disposed to pass in order through positioning holes (13e, 15e, 14e) provided in each of the first flange (13), the intermediate ring (15), and the second flange (14).

Inventors:
KAWASHIMA Toshiaki (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
Application Number:
JP2019/010417
Publication Date:
September 26, 2019
Filing Date:
March 13, 2019
Export Citation:
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Assignee:
EDWARDS JAPAN LIMITED (1078-1, Yoshihashi Yachiyo-shi Chiba, 23, 〒2768523, JP)
International Classes:
F04D29/66; F04B37/16; F04D19/04; F04D29/08; F04D29/42; F16F15/08
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