Title:
VACUUM PUMP, DETOXIFYING DEVICE, AND EXHAUST GAS PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/166815
Kind Code:
A1
Abstract:
Provided is a vacuum pump which can achieve energy savings when detoxifying exhausting gas. A vacuum pump (2) that suctions and discharges exhausting gas is characterized by comprising: a motor (MT) as a driving source; and a first controller (29) which controls the driving of the motor, wherein the first controller monitors the state of the motor and externally outputs a specific signal (process signal) when the motor state is in a specific state except for starting and stopping times.
Inventors:
ENOMOTO YOSHIHIRO (JP)
Application Number:
PCT/JP2021/005364
Publication Date:
August 26, 2021
Filing Date:
February 12, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F04B49/02; F23G7/06
Foreign References:
| JP2012057192A | 2012-03-22 | |||
| JPH07246529A | 1995-09-26 | |||
| JP2014231822A | 2014-12-11 | |||
| JP2003129957A | 2003-05-08 | |||
| JP2015194150A | 2015-11-05 |
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