VACUUM PUMP DEVICE AND CONTROLLER THEREFOR

Title:

VACUUM PUMP DEVICE AND CONTROLLER THEREFOR

Document Type and Number:

WIPO Patent Application WO/2007/013274

Kind Code:

A1

Abstract:

[PROBLEMS] To reduce the size of a vacuum pump device while eliminating vibration by efficiently removing the heat of a control circuit substrate incorporated in a controller without relying upon conventional forced air-cooling system and water-cooling system. [MEANS FOR SOLVING PROBLEMS] In this controller (3) mounted on the outside of a pump body (2) and having the built-in control circuit substrate (34) to control the operation of the pump body, a heat sink (4) covering the periphery of the controller (3) and having a plurality of fins (43, 43,...) arranged in order on the outer wall surface thereof is installed, the orientations of the fins (43) are tilted relative to the rotating center axis (L) of the pump body (2), and a large number of vent holes (36, 36,...) are opened in the rear panel (31-2) and the bottom panel (31-3) of a controller case (31). Thus, even if the pump body (2) takes any attitude against a vacuum chamber (10), the heat radiating surfaces of the fins (43) face diagonal upward, and accordingly the natural convection of air flowing between the fins (43, 43) is liable to occur and hot air in the case is securely released to the outside through the vent holes (36). As a result, the heat radiating efficiency of the heated controller (3) can be increased.

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Inventors:

OKUDERA SATOSHI (JP)
KABASAWA TAKASHI (JP)
SAKAGUCHI YOSHIYUKI (JP)

Application Number:

PCT/JP2006/313456

Publication Date:

February 01, 2007

Filing Date:

July 06, 2006

Export Citation:

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Assignee:

BOC EDOWARDS JAPAN LTD (JP)
OKUDERA SATOSHI (JP)
KABASAWA TAKASHI (JP)
SAKAGUCHI YOSHIYUKI (JP)

International Classes:

F04B37/16; F04B39/06; F04D19/04; F04D29/00

Foreign References:

JP2871108B2	1999-03-17
JPH11173293A	1999-06-29
JP2000059060A	2000-02-25
JPH0618699U	1994-03-11
JP2001274699A	2001-10-05
JPH0888301A	1996-04-02
JP2004183619A	2004-07-02

Attorney, Agent or Firm:

WADA, Shigenori et al. (15-16 Uchikanda 1-chome, Chiyoda-k, Tokyo 47, JP)

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