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Title:
VACUUM PUMP DEVICE, AND PUMP MAIN BODY UNIT, CONTROL UNIT AND SPACER USED IN VACUUM PUMP DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/135412
Kind Code:
A1
Abstract:
[Problem] The present invention addresses the problem of providing a vacuum pump device, whereby the thickness, weight, and size of a vacuum pump control device can be reduced, and cost can be reduced. [Solution] A vacuum pump device (10) is formed by integrating with each other a pump main body unit (11) and a control unit (12) that controls drive of the pump main body unit (11). The vacuum pump device is configured such that a spacer (13), which supports a load applied to a housing (22) of the control unit (12), is provided between a base (15) of the pump main body unit (11), and the housing (22) of the control unit (12).

Inventors:
SAKAGUCHI Yoshiyuki (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
SUN Yanbin (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
SAEGUSA Kengo (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
OMORI Hideki (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
Application Number:
JP2018/000698
Publication Date:
July 26, 2018
Filing Date:
January 12, 2018
Export Citation:
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Assignee:
EDWARDS JAPAN LIMITED (1078-1, Yoshihashi Yachiyo-shi Chiba, 23, 〒2768523, JP)
International Classes:
F04B39/00; F04B37/16; F04D19/04; F04D29/64; H05K5/02
Foreign References:
JP3165857B22001-05-14
JPS6246898U1987-03-23
JP2000183552A2000-06-30
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