Title:
VACUUM PUMP AND VACUUM EXHAUST DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/186076
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that can improve cleaning performance. [Solution] The present invention comprises a heater 11, purge gas introduction ports 12, 13, a purge gas valve 14, and an evacuation valve 16. A cleaning operation mode by which deposits in a turbomolecular pump 100 can be sublimated is included as an operation mode. In the cleaning operation mode, at least one among the heater 11, the purge gas valve 14, or the vacuum valve 16 is controlled so at least a portion of the interior of the turbomolecular pump 100 is equal to or greater than the sublimation temperature of the deposit and boosted to a pressure range for an intermediate flow or a viscous flow.
Inventors:
KABASAWA TAKASHI (JP)
Application Number:
PCT/JP2022/007939
Publication Date:
September 09, 2022
Filing Date:
February 25, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2021507172A | 2021-02-22 | |||
| JP2013119798A | 2013-06-17 | |||
| JP2018150837A | 2018-09-27 | |||
| JP2020002838A | 2020-01-09 | |||
| JP2019165839A | 2019-10-03 | |||
| JP2011080407A | 2011-04-21 |
Download PDF:
Previous Patent: VACUUM PUMP
Next Patent: VEHICLE CONTROL DEVICE, VEHICLE CONTROL METHOD, AND PROGRAM
Next Patent: VEHICLE CONTROL DEVICE, VEHICLE CONTROL METHOD, AND PROGRAM