VACUUM PUMP, AND FLEXIBLE COVER AND ROTOR USED IN SAID VACUUM PUMP

Title:

VACUUM PUMP, AND FLEXIBLE COVER AND ROTOR USED IN SAID VACUUM PUMP

Document Type and Number:

WIPO Patent Application WO/2017/138154

Kind Code:

A1

Abstract:

[Problem] To provide a vacuum pump which suppresses the penetration of foreign matter such as rust or particles attributable to a process gas into a semiconductor wafer manufacturing process, and a flexible cover and a rotor for use in the vacuum pump. [Solution] A vacuum pump 1 is provided with: a casing 10 having a gas intake port 12a and a gas exhaust port 11a; and a rotor 20 which has a recessed portion 29 opening toward the gas intake port 12a and which is fastened to a rotor shaft 21 by means of bolts 25 disposed in the recessed portion 29. In the recessed portion 29 is provided a flexible cover 80 which deforms elastically in a convex shape toward the recessed portion 29 and covers the recessed portion 29. An outer circumferential portion 80a of the flexible cover 80 is supported on an end surface 20a of the rotor 20 that faces the gas intake port 12a, and a central portion 80b thereof is sunk into the recessed portion 29 of the rotor 20.

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Inventors:

KAWANISHI SHINJI (JP)
SAKAGUCHI YOSHIYUKI (JP)
SAEGUSA KENGO (JP)

Application Number:

PCT/JP2016/054170

Publication Date:

August 17, 2017

Filing Date:

February 12, 2016

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)

International Classes:

F04D19/04; F04D29/70

Domestic Patent References:

WO2014109280A1

2014-07-17

Foreign References:

US20140271174A1	2014-09-18
US5528618A	1996-06-18
JP2014055574A	2014-03-27
JPH0596995U	1993-12-27

Other References: