Title:
VACUUM PUMP AND HEAT INSULATING SPACER USED FOR SAID VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2015/122215
Kind Code:
A1
Abstract:
[Problem] To provide: a vacuum pump configured so that the solidification of gas within a screw groove is prevented; and a heat insulating spacer used for the vacuum pump.
[Solution] A vacuum pump (1) is provided with a heat insulating spacer (90) installed between a casing (10) and an outer peripheral stator (70) which has a screw groove (71), the heat insulating spacer (90) supporting the outer peripheral stator (70) in the radial direction of the rotor in such a manner that: a gap is provided between the casing (10) and the outer peripheral stator (70); and the outer peripheral stator (70) is coaxial with a rotor (20), the heat insulating spacer (90) having lower heat conductivity than the casing (10) and the outer peripheral stator (70).
Inventors:
SAKAGUCHI YOSHIYUKI (JP)
KUROKAWA NORIHIRO (JP)
KUROKAWA NORIHIRO (JP)
Application Number:
PCT/JP2015/050315
Publication Date:
August 20, 2015
Filing Date:
January 08, 2015
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
JPH09310696A | 1997-12-02 | |||
JPH074384A | 1995-01-10 | |||
JP2002303293A | 2002-10-18 | |||
JP2006037951A | 2006-02-09 | |||
JP2001032789A | 2001-02-06 |
Other References:
See also references of EP 3106669A4
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