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Patent Searching and Data


Title:
VACUUM PUMP AND HEAT INSULATING SPACER USED FOR SAID VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2015/122215
Kind Code:
A1
Abstract:
[Problem] To provide: a vacuum pump configured so that the solidification of gas within a screw groove is prevented; and a heat insulating spacer used for the vacuum pump. [Solution] A vacuum pump (1) is provided with a heat insulating spacer (90) installed between a casing (10) and an outer peripheral stator (70) which has a screw groove (71), the heat insulating spacer (90) supporting the outer peripheral stator (70) in the radial direction of the rotor in such a manner that: a gap is provided between the casing (10) and the outer peripheral stator (70); and the outer peripheral stator (70) is coaxial with a rotor (20), the heat insulating spacer (90) having lower heat conductivity than the casing (10) and the outer peripheral stator (70).

Inventors:
SAKAGUCHI YOSHIYUKI (JP)
KUROKAWA NORIHIRO (JP)
Application Number:
PCT/JP2015/050315
Publication Date:
August 20, 2015
Filing Date:
January 08, 2015
Export Citation:
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Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
JPH09310696A1997-12-02
JPH074384A1995-01-10
JP2002303293A2002-10-18
JP2006037951A2006-02-09
JP2001032789A2001-02-06
Other References:
See also references of EP 3106669A4
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