Title:
VACUUM PUMP, MAGNETIC BEARING DEVICE, AND ROTOR
Document Type and Number:
WIPO Patent Application WO/2018/193944
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump, a magnetic bearing device, and a rotor with which rotor undulations or vibrations can be reduced.
[Solution] A vacuum pump 1 in which the center of gravity G1 of a rotor 20, an active radial bearing 71 which contactlessly supports the rotor 20 in a radial direction R by means of magnetic force, and a passive radial bearing 72 which contactlessly supports the rotor 20 in the radial direction R by means of magnetic force are arranged in this order in a gas exhaust direction.
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Inventors:
KAWASHIMA TOSHIAKI (JP)
Application Number:
PCT/JP2018/015285
Publication Date:
October 25, 2018
Filing Date:
April 11, 2018
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F16C32/04
Foreign References:
| JP2016145555A | 2016-08-12 | |||
| JP2002286036A | 2002-10-03 | |||
| JPH0646036B2 | 1994-06-15 | |||
| JP2017020520A | 2017-01-26 | |||
| JPS5983828A | 1984-05-15 |
Other References:
See also references of EP 3613987A4
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