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Title:
VACUUM PUMP, AND MAGNETIC BEARING UNIT AND SHAFT PROVIDED IN VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2018/193943
Kind Code:
A1
Abstract:
Provided are a vacuum pump with a reduced vacuum pump total height, and a magnetic bearing unit and a shaft provided in the vacuum pump. In the present embodiment, in a shaft-side lower portion of a five-axis control magnetic bearing, a lower-side Ra sensor target (29), a fourth spacer (28), and an Ra electromagnet target (27) are disposed in this order from an intake opening side toward an exhaust opening side. In a stator-side lower portion, a lower-side Ra sensor (10) and a lower-side Ra electromagnet (9) are disposed in this order from the intake opening direction toward the exhaust opening direction. That is, the lower-side Ra sensor (10) is disposed on the upper side of the lower-side Ra electromagnet (9). The configuration makes it possible to reduce the length of a third spacer (26) fixed on the lower-side Ra sensor target (29), enabling a decrease in the length (S) of the shaft. As a result, it becomes possible to reduce the height (M) of the five-axis control magnetic bearing and to lower a stator column in which an electronic component unit of the five-axis control magnetic bearing is contained. Thus, the total height (T) of the vacuum pump can be reduced.

Inventors:
SHI Yongwei (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
MIWATA Tooru (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
SAKAGUCHI Yoshiyuki (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
Application Number:
JP2018/015284
Publication Date:
October 25, 2018
Filing Date:
April 11, 2018
Export Citation:
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Assignee:
EDWARDS JAPAN LIMITED (1078-1, Yoshihashi Yachiyo-shi Chiba, 23, 〒2768523, JP)
International Classes:
F04D19/04; F16C32/04
Foreign References:
JPS5879695A1983-05-13
JP2000283160A2000-10-13
JP2002242876A2002-08-28
JPH0414815U1992-02-06
JP2000283161A2000-10-13
JP5785494B22015-09-30
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