Title:
VACUUM PUMP AND ROTARY CYLINDRICAL BODY INSTALLED IN VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2018/043072
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump and a rotary cylindrical body installed in the vacuum pump, capable of reducing stress without reducing the rotation speed of the rotary cylindrical body (rotary body). [Solution] In this vacuum pump pertaining to the present invention, the exhaust port side lower part of the rotor cylinder part (rotating cylindrical body) of the vacuum pump has a diameter-reduced part having an outer diameter which is smaller than the outer diameter of the intake side. More specifically, the lowest end part (exhaust port-side end part) of the rotor cylinder part is designed to be longer than a screw groove exhaust component (screw groove type exhaust mechanism) in order to provide an extended part. Next, a diameter-reduced part is provided on the extended part of the rotor cylinder part in such a manner as to have an outer diameter which is smaller than the portion (opposing part) of the rotor cylinder part located on the intake side thereof and facing the screw groove exhaust component. With a configuration having the diameter-reduced part, stress generated on the inner diameter side of the rotor cylinder part can be reduced without reducing the rotation speed of the rotary body (rotor cylinder part).
Inventors:
SAKAGUCHI YOSHIYUKI (JP)
MIWATA TOORU (JP)
YOSHIHARA NAHOKO (JP)
MIWATA TOORU (JP)
YOSHIHARA NAHOKO (JP)
Application Number:
PCT/JP2017/028865
Publication Date:
March 08, 2018
Filing Date:
August 09, 2017
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2012077411A1 | 2012-06-14 |
Foreign References:
| JPH10246197A | 1998-09-14 |
Other References:
See also references of EP 3524821A4
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