Title:
VACUUM PUMP, ROTARY PORTION PROVIDED IN VACUUM PUMP, AND UNBALANCE CORRECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/147191
Kind Code:
A1
Abstract:
[Problem] To realize a vacuum pump having a structure to reduce stress concentration during balance correction by mass elimination, a rotary portion provided in a vacuum pump, and an unbalance correction method.
[Solution] According to the embodiment, at least a part of a lower end (exhaust port side) of a rotational cylindrical body is cut in an axial direction to form an unbalance correction part (elimination part). Preferably, the elimination part is formed by shaving an axial direction width of the rotational cylindrical body as shallowly as possible at a lower end of the rotational cylindrical body, and by shaving the rotational cylindrical body so that a peripheral direction width of the rotational cylindrical body becomes greater than or equal to a thickness (width in a radial direction) of the rotational cylindrical body. In addition, the elimination part is formed to have a greatly rounded edge (for example R3 or more). In this configuration, the rotational cylindrical body is formed with the elimination part shaped with a shallow elimination width (depth) in the axial direction and a wide elimination width in the peripheral direction of the rotational cylindrical body. Thus, stress concentration after balance correction in a vacuum pump can be reduced or mitigated.
Inventors:
MITSUHASHI KEITA (JP)
OOKI TOSHIYUKI (JP)
OOKI TOSHIYUKI (JP)
Application Number:
PCT/JP2018/003627
Publication Date:
August 16, 2018
Filing Date:
February 02, 2018
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JPH0174398U | 1989-05-19 | |||
| JP2016166594A | 2016-09-15 | |||
| JP2002327697A | 2002-11-15 | |||
| JP3974772B2 | 2007-09-12 | |||
| JP3819267B2 | 2006-09-06 | |||
| JP2003148378A | 2003-05-21 |
Other References:
See also references of EP 3581801A4
Download PDF: