Title:
VACUUM PUMP, AND ROTATING BODY OF SAME
Document Type and Number:
WIPO Patent Application WO/2022/153981
Kind Code:
A1
Abstract:
Provided are a vacuum pump and a rotating body thereof, with which stress corrosion cracking of the rotating body can be effectively prevented, and which have excellent corrosion resistance. In a vacuum pump (such as a turbo molecular pump (100)) which evacuates gas by means of the rotation of a rotating body (103), the rotating body (103) includes, on the surface thereof, a first region (1) covered by a first surface treated layer (1A) and a second region (2) covered by a second surface treated layer (2A), wherein a boundary portion (3) of the first region (1) and the second region (2) includes a region in which the respective surface treated layers (1A, 2A) overlap.
Inventors:
MIWATA TOORU (JP)
SAKAGUCHI YOSHIYUKI (JP)
SAKAGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2022/000594
Publication Date:
July 21, 2022
Filing Date:
January 11, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2005028874A1 | 2005-03-31 |
Foreign References:
| JP2018084191A | 2018-05-31 | |||
| JP2015229949A | 2015-12-21 |
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