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Title:
VACUUM PUMP, ROTATIONAL SOLID, COVER SECTION, AND METHOD FOR MANUFACTURING ROTATIONAL SOLID
Document Type and Number:
WIPO Patent Application WO/2022/158336
Kind Code:
A1
Abstract:
A vacuum pump (100) according to the present embodiment comprises: a rotational solid (103) that has a rotating shaft (113) and a through-hole (220) through which the top part of the rotating shaft (113) is passed, and that is provided with rotating blades (102) passed through the through-hole (220) at the top parts and secured; and a cover section (500) secured to the rotational solid (103) so as to cover the top part of the rotating shaft (113) and the through-hole (220), the cover section (500) including a function for correcting the balance of the rotational solid (103) and having corrosion resistance against exhaust gas. Due to the cover section (500) being provided, contact between the top part of the shaft and corrosive gas can be avoided and dust generation from the shaft can be prevented, and because the cover section (500) includes a function for correcting the balance of the rotational solid (103), unbalancing of the rotational solid (103) can be corrected.

Inventors:
MIWATA TOORU (JP)
Application Number:
PCT/JP2022/000595
Publication Date:
July 28, 2022
Filing Date:
January 11, 2022
Export Citation:
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Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
WO2017138154A12017-08-17
Foreign References:
JP2018035684A2018-03-08
JP2007239464A2007-09-20
US20140271174A12014-09-18
JP2003148389A2003-05-21
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