Title:
VACUUM PUMP AND SPACER
Document Type and Number:
WIPO Patent Application WO/2022/163341
Kind Code:
A1
Abstract:
Proposed are: a vacuum pump which can suppress a temperature increase of a fixed blade caused by heat from a heating source without increasing the number of components; and a spacer used in said vacuum pump. The present invention is a vacuum pump comprising: a plurality of rotary blades (102) which rotate together with rotary shafts (103, 113); a plurality of fixed blades (123) which are disposed in multiple stages between the rotary blades (102); and a plurality of spacers (125) which are provided in multiple stages inside casings (114, 129) and hold the fixed blades (123) in predetermined positions, the vacuum pump being characterized in that at least one spacer (125d, 125e) among the plurality of spacers (125) which hold the fixed blades (123) has a recessed surface (125d4, 125e4) in a contact surface (125d3, 125e3) contacting the fixed blades (123).
Inventors:
SUZUKI HARUKI (JP)
Application Number:
PCT/JP2022/000593
Publication Date:
August 04, 2022
Filing Date:
January 11, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2020195943A1 | 2020-10-01 |
Foreign References:
| JP2016176340A | 2016-10-06 | |||
| JP2006152958A | 2006-06-15 |
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