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Title:
VACUUM PUMP AND STATIONARY PARTS, EXHAUST PORT, AND CONTROL MEANS USED THEREWITH
Document Type and Number:
WIPO Patent Application WO/2019/131682
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that is favorable for removing products accumulated in a flow passage inside the vacuum pump, and to provide stationary parts, an exhaust port, and a control means to be used with the vacuum pump. [Solution] A vacuum pump P1 is provided with: a flow passage R for a gas that moves from an intake opening 2 toward an exhaust opening 3; and a removal means RM for removing products accumulated on an internal wall surface of the flow passage R. The removal means RM is provided with ejection holes 91, 92, 93 each having one end that opens at the internal wall surface of the flow passage R. The removal means is configured to eject a removal gas from the ejection holes 91, 92, 93 toward the inside of the flow passage R.

Inventors:
YAMAMOTO Kazushi (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
NONAKA Manabu (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
SAKAGUCHI Yoshiyuki (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
KABASAWA Takashi (1078-1 Yoshihash, Yachiyo-shi Chiba 23, 〒2768523, JP)
Application Number:
JP2018/047673
Publication Date:
July 04, 2019
Filing Date:
December 25, 2018
Export Citation:
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Assignee:
EDWARDS JAPAN LIMITED (1078-1, Yoshihashi Yachiyo-shi Chiba, 23, 〒2768523, JP)
International Classes:
F04D19/04
Foreign References:
JP2007270742A2007-10-18
JPH01216082A1989-08-30
JP2005325792A2005-11-24
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