VACUUM PUMP, STATOR COLUMN USED THEREIN, AND MANUFACTURING METHOD FOR SAME

Title:

VACUUM PUMP, STATOR COLUMN USED THEREIN, AND MANUFACTURING METHOD FOR SAME

Document Type and Number:

WIPO Patent Application WO/2018/110467

Kind Code:

A1

Abstract:

Provided, without lowering exhaust performance or increasing the number of components or costs, is a vacuum pump, a stator column used therein, and a manufacturing method for the same which are suitable and highly reliable in preventing faults such as the cracking of the stator column due to the fracture energy of a rotary body or the ejection of fragments produced by damage to the stator column from an intake port. The vacuum pump is provided with: an outer body (1) having an intake port (1A); a stator column (3) installed inside the outer body; a rotary body (4) having a shape surrounding the outer periphery of the stator column; a support means for rotatably supporting the rotary body; and a drive means for rotationally driving the rotary body. The rotation of the rotary body causes the intake port to take in gas. The stator column (3) is an aluminum alloy casting material having an elongation of at least 5% as a mechanical material property.

Inventors:

MITSUHASHI KEITA (JP)
MIWATA TOORU (JP)

Application Number:

PCT/JP2017/044247

Publication Date:

June 21, 2018

Filing Date:

December 08, 2017

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)

International Classes:

F04D19/04

Domestic Patent References:

WO2011024528A1

2011-03-03

Foreign References:

JP2005180265A	2005-07-07
JP5274446B2	2013-08-28
JP2001059496A	2001-03-06

Other References: