Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2005/085643
Kind Code:
A1
Abstract:
A vacuum pump, comprising a shaft seal not eroded by corrosive gas and assuring smooth operation. A shaft seal structure (17) is installed on the outer peripheral surfaces of bearing bodies (16M) and (16FM) positioned inside the cylinders of screw rotors (13M) and (13FM) formed in roughly cylindrical shapes. The shaft seal structure (17) forms a static pressure seal. A seal gas is led from the bearing bodies (16M) and (16FM) into clearances between the outer peripheral surfaces of the bearing bodies (16M) and (16FM) and the rotor cylinder inner peripheral surfaces (7) of the screw rotors (13M) and (13FM).
Inventors:
OHMI TADAHIRO (JP)
Application Number:
PCT/JP2005/002153
Publication Date:
September 15, 2005
Filing Date:
February 14, 2005
Export Citation:
Assignee:
OHMI TADAHIRO (JP)
International Classes:
F04B39/00; F04C25/02; F04C27/00; F04C29/00; F04D19/04; F04D29/10; F04C18/16; (IPC1-7): F04C27/00; F04B39/00; F04C25/02; F04C29/00; F04D19/04
Domestic Patent References:
| WO1997001038A1 | 1997-01-09 |
Foreign References:
| JPS6143298A | 1986-03-01 | |||
| US3071384A | 1963-01-01 | |||
| JPH01216082A | 1989-08-30 | |||
| JP2000073976A | 2000-03-07 |
Attorney, Agent or Firm:
Ikeda, Noriyasu (4-10 Nishishinbashi 1-chom, Minato-ku Tokyo 03, JP)
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