VACUUM PUMP - EDWARDS JAPAN LTD

Title:

VACUUM PUMP

Document Type and Number:

WIPO Patent Application WO/2011/021428

Kind Code:

A1

Abstract:

Provided is a vacuum pump wherein the temperature can be controlled using heating devices or cooling devices, the number of which is smaller than the number of the temperature sensors arranged on the pump. There are a plurality of temperature sensors each one of which is disposed for each target within the pump, whereas only one set of a heater (147) and an electromagnetic valve (163) is disposed. The propriety order of the temperature sensors is determined, and the set of the heater and the electromagnetic valve is controlled on the basis of output signals of the temperature sensors. Thus, the priority order of the temperature sensors is determined, so that the temperature of a target on which the temperature sensor having a high priority is disposed is first controlled within a control range by rapidly performing an on/off control for the target. After that, the temperature of a target on which the temperature sensor having a low priority is disposed is controlled within a control range.

Inventors:

MIWATA TOORU (JP)
ISHII KEIICHI (JP)
MACHIDA KATSUHIDE (JP)
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)

Application Number:

PCT/JP2010/060041

Publication Date:

February 24, 2011

Filing Date:

June 14, 2010

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)
MIWATA TOORU (JP)
ISHII KEIICHI (JP)
MACHIDA KATSUHIDE (JP)
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)

International Classes:

F04D19/04

Foreign References:

JP2001329991A	2001-11-30
JP2002285992A	2002-10-03
JPH02252996A	1990-10-11
JP2002257079A	2002-09-11

Other References: