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Patent Searching and Data


Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2011/162070
Kind Code:
A1
Abstract:
Disclosed is a vacuum pump which allows for using a cylindrical rotor that is provided by forming a fiber reinforced plastic material in a cylindrical shape without requiring a finish after the formation of the cylindrical rotor. The vacuum pump has a turbo-molecular vacuum pump section (14) and a screw groove pump section (15), in which the upper end portion of the cylindrical rotor (21) of the screw groove pump section (15) is jointed to the lower end portion of a rotor (17) of the turbo-molecular vacuum pump section (14), the cylindrical rotor (21) being provided by forming a fiber reinforced plastic material in a cylindrical shape. In this vacuum pump, the joint portion of the rotor (17) of the turbo-molecular vacuum pump section (14) and the cylindrical rotor (21) of the screw groove pump section (15) is disposed upstream of an exhaust gas path (24). This eliminates the necessity of a finish after the formation of the cylindrical rotor (21). To finish the cylindrical rotor (21) after having been formed, the cylindrical rotor (21) may be coated with resin on the recessed and projected portion thereof or have fibers wound therearound in a helical fashion at an angle of winding of 45 degrees or less.

Inventors:
KABASAWA TAKASHI (JP)
Application Number:
PCT/JP2011/062148
Publication Date:
December 29, 2011
Filing Date:
May 20, 2011
Export Citation:
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Assignee:
EDWARDSJAPAN LTD (JP)
KABASAWA TAKASHI (JP)
International Classes:
F04D19/04
Foreign References:
JP2004278512A2004-10-07
JP3098139B22000-10-16
JPS62203721A1987-09-08
JP3098139B22000-10-16
JP2004278512A2004-10-07
Other References:
See also references of EP 2587069A4
Attorney, Agent or Firm:
HAYASHI TAKAYOSHI (JP)
Wood Kokichi (JP)
Download PDF:
Claims: