VACUUM PUMP - EDWARDS JAPAN LTD

Title:

VACUUM PUMP

Document Type and Number:

WIPO Patent Application WO/2012/053270

Kind Code:

A1

Abstract:

Provided is a vacuum pump for which the substrate wiring is simple and for which the substrate can be cooled easily. A plate (201) is provided so as to cover an aperture in the casing on the pump main body (100) side, and this plate (201) is constructed as a substrate unit which also serves as a casing on the control unit (200) side. An AMB control substrate (209) and an atmosphere-side connecting plate (211) are directly soldered to and integrated with the pins (207) of a terminal (210), which are affixed so as to pass through the plate (201). Accordingly, the casing portion and the sealing structure can be formed in a simple manner. Therefore, a water-resistant structure can be formed with the inexpensive terminal (210) without requiring expensive water-resistant connectors (1) and (3). In addition, by cooling this plate (201) the electrical components mounted respectively on the AMB control substrate (209) on the vacuum side and on the atmosphere-side connecting substrate (211) on the atmosphere side can be cooled simultaneously.

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Inventors:

SCHRODER ULRICH (FR)
CARRASCO EDUARDO (FR)
HENRY BENOIT (FR)

Application Number:

PCT/JP2011/067329

Publication Date:

April 26, 2012

Filing Date:

July 28, 2011

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)
MECANIQUE MAGNETIQUE SA (FR)
SCHRODER ULRICH (FR)
CARRASCO EDUARDO (FR)
HENRY BENOIT (FR)

International Classes:

F04D19/04

Foreign References:

JPH10159786A	1998-06-16
JPH04104196U	1992-09-08
JP2007278278A	2007-10-25
CA2695506A1	2009-03-05
JPH11173293A	1999-06-29

Other References: