Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2012/081726
Kind Code:
A1
Abstract:
A vacuum pump is provided with a rotor which rotates to perform evacuation, a pump disassembly detection circuit which detects a disassembly state in which the vacuum pump is disassembled, and a pump operation prohibition circuit which prohibits rotary drive of the rotor when it is determined that the pump disassembly detection circuit has detected the disassembly state.
Inventors:
OHFUJI MASAKI (JP)
HASHIMOTO TOSHIFUMI (JP)
TANAKA SHINGO (JP)
HASHIMOTO TOSHIFUMI (JP)
TANAKA SHINGO (JP)
Application Number:
PCT/JP2011/079391
Publication Date:
June 21, 2012
Filing Date:
December 19, 2011
Export Citation:
Assignee:
SHIMADZU CORP (JP)
OHFUJI MASAKI (JP)
HASHIMOTO TOSHIFUMI (JP)
TANAKA SHINGO (JP)
OHFUJI MASAKI (JP)
HASHIMOTO TOSHIFUMI (JP)
TANAKA SHINGO (JP)
International Classes:
F04D19/04; F04D27/00
Domestic Patent References:
| WO2009127483A1 | 2009-10-22 |
Foreign References:
| JP2005273657A | 2005-10-06 | |||
| JPH11338355A | 1999-12-10 | |||
| JP2000099404A | 2000-04-07 | |||
| JP2002229682A | 2002-08-16 | |||
| JP2007128199A | 2007-05-24 | |||
| JP2003148384A | 2003-05-21 | |||
| JP2003021093A | 2003-01-24 | |||
| JP2008038844A | 2008-02-21 | |||
| JP2010281909A | 2010-12-17 |
Other References:
See also references of EP 2628957A4
Attorney, Agent or Firm:
NAGAI, Fuyuki (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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Claims: