VACUUM PUMP - EDWARDS JAPAN LTD

Title:

VACUUM PUMP

Document Type and Number:

WIPO Patent Application WO/2014/119191

Kind Code:

A1

Abstract:

[Problem] To effectively reduce the amount of adhered product material in an entire vacuum pump and prevent problems in the electrical system of the vacuum pump due to leakage of magnetic flux. [Solution] A vacuum pump (P1) equipped with: a rotor (6) encased in a pump case (1A); a rotary shaft (5) affixed to the rotor (6); a support means that supports the rotary shaft in a rotatable manner; a drive means that rotates the rotary shaft; and thread groove exhaust part stators (18A, 18B), with thread groove exhaust passages (R1, R2) being formed between the thread groove exhaust part stators and the outer circumferential side or the inner circumferential side of the rotor. In addition, a heating part (20) is provided at the bottom part of the thread groove exhaust stators, and the heating part (20) is configured so as to be equipped with a yoke (25), a coil (26), and a heating plate (23), with the yoke (25) and the heating plate (23) being heated by electromagnetic induction heating when alternating current flows in the coil (26).

Inventors:

SHI YONGWEI (JP)
NONAKA MANABU (JP)
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)

Application Number:

PCT/JP2013/084634

Publication Date:

August 07, 2014

Filing Date:

December 25, 2013

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)

International Classes:

F04D19/04

Foreign References:

JP2002021775A	2002-01-23
JPH07145952A	1995-06-06
JP2012179409A	2012-09-20
JP2002048088A	2002-02-15
JP2002180988A	2002-06-26
JPH0512691U	1993-02-19
JP2002021775A	2002-01-23

Other References: