VACUUM PUMP - EDWARDS JAPAN LTD

Title:

VACUUM PUMP

Document Type and Number:

WIPO Patent Application WO/2016/121573

Kind Code:

A1

Abstract:

[Problem] To reduce gaps and misalignment in a joining surface to which a divided structure is joined in a vacuum pump having a fixed disc with a divided structure. [Solution] In the turbomolecular pump according to the present invention, the spigot relationship between a fixed disc and a fixed member for centering is opposite from convention. In other words, in a structure for fitting a base and a fixed disc, centering (positioning) is performed by a structure in which the outer peripheral surface of the fixed disc is pushed in and joined (restrained from the outer side) by the inner peripheral surface of the base. The spigot structure of the fixed disc is configured from integrated components. Furthermore, the spigot position of the fixed disc, which has a Siegbahn structure, is provided separate from a fixed blade.

Inventors:

OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)

Application Number:

PCT/JP2016/051420

Publication Date:

August 04, 2016

Filing Date:

January 19, 2016

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)

International Classes:

F04D19/04

Domestic Patent References:

WO2010016141A1

2010-02-11

Foreign References:

JPH04330397A	1992-11-18
JPS6077795U	1985-05-30
JPH0465992U	1992-06-09

Other References: