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Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2018/220943
Kind Code:
A1
Abstract:
A vacuum pump according to one embodiment of the present invention comprises a pump body and a muffler. The pump body has a housing having an intake port and an exhaust port, and a rotor that is rotatably disposed inside the housing and that delivers a gas from the intake port to the exhaust port. The muffler has a casing, a first passage, and a second passage. The casing has an open end hermetically connected to the outer wall surface of the housing, a bottom wall facing the open end, and a peripheral wall, and an expansion chamber is divided into sections by the outer wall surface of the housing and the inner wall surfaces of the bottom wall and the peripheral wall. The first passage is provided to the casing, and the first passage guides the gas discharged from the exhaust port into the expansion chamber. The second passage is provided to the casing, and the second passage discharges the gas in the expansion chamber out of the casing.

Inventors:
SUZUKI TOSHIO (JP)
TANAKA TOMONARI (JP)
HASHIMOTO KENJI (JP)
Application Number:
PCT/JP2018/009972
Publication Date:
December 06, 2018
Filing Date:
March 14, 2018
Export Citation:
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Assignee:
ULVAC INC (JP)
International Classes:
F04B39/00; F04C25/02; F04C29/00; F04C29/06
Foreign References:
JPH08135586A1996-05-28
JPS5935692U1984-03-06
JPH0447183A1992-02-17
JP2013113232A2013-06-10
JPS6383425A1988-04-14
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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