Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2021/010347
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a vacuum pump in which the strength of the fixing portion of a stator column is maintained, the conductance of an exhaust flow path is maintained, and the exhaust performance does not deteriorate even if the diameter of the rotor cylindrical section in the radial direction is reduced. The vacuum pump according to an embodiment of the present invention includes a linked-type thread groove spacer which is a structure connecting a Siegbahn pump portion and a thread groove pump section, and when the outlet position of the thread groove, which is an exhaust flow path section of the linked-type thread groove spacer, is near the fixing portion (fixing bolt) of a stator column, the conductance of the exhaust flow path is lowered. Therefore, the phases of the thread peaks of the linked-type thread groove spacer and the installation position of the fixing portion of the stator column in the circumferential direction are aligned as much as possible. In other words, the thread groove of the linked-type thread groove spacer, which is the exhaust flow path, is provided within the circumferential direction of the installation position of the fixing portion of the stator column to suppress the decrease in the conductance of the exhaust flow path.
Inventors:
TAKEDA SHUNSUKE (JP)
SAKAGUCHI YOSHIYUKI (JP)
SAKAGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2020/027129
Publication Date:
January 21, 2021
Filing Date:
July 10, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2017137840A | 2017-08-10 | |||
| JP2015143513A | 2015-08-06 | |||
| JPH09310696A | 1997-12-02 |
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