Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/054717
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that makes it possible to decrease a flow of gas (the number of gas molecules) toward a gap provided for heat insulation, reduce the amount of a byproduct deposited in the gap, and extend the interval of required maintenance, thereby improving productivity. [Solution] A vacuum pump comprising: an outer cylinder 127 having an inlet port 101 and an exhaust port 133; a rotor shaft 113 rotatably supported inside the outer cylinder 127; a plurality of stages of rotary vanes 102 rotatable together with the rotor shaft 113; a plurality of stages of stationary vanes 123 secured to the outer cylinder, and disposed between the plurality of stages of rotary vanes 102; and a cooling-side stator 110A and a heating-side stator 110B that hold the plurality of stages of stationary vanes 123 at predetermined intervals. An opening 114A of a gap 114 with a predetermined width for insulating heat between the cooling-side stator 110A and the heating-side stator 110B is provided at a position not facing the outer peripheral surface of the rotary vane 102 in the axial direction of a rotor 103.
Inventors:
MIWATA TOORU (JP)
TAKAI YOSHIYUKI (JP)
SAKAGUCHI YOSHIYUKI (JP)
TAKAI YOSHIYUKI (JP)
SAKAGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2021/032481
Publication Date:
March 17, 2022
Filing Date:
September 03, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2019188732A1 | 2019-10-03 |
Foreign References:
| JP2015086856A | 2015-05-07 | |||
| JP2015031153A | 2015-02-16 | |||
| JPH07508082A | 1995-09-07 | |||
| JPH10205486A | 1998-08-04 |
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