Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/097577
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump excellent in exhaust performance. [Solution] A vacuum pump according to the present invention comprises: a Siegbahn type exhaust mechanism portion 201 provided with Siegbahn spiral groove portions 262 in at least any one of rotating discs 220a to 220c and fixed discs 219a and 219b; and a Holweck type exhaust mechanism portion 301 provided with a screw groove 131a in at least any one of a cylindrical portion 102d and a spacer 131 with a screw, which are included in a rotary body 103, wherein the Holweck type exhaust mechanism portion 301 is arranged on the downstream side of the Siegbahn type exhaust mechanism portion 201. The Holweck type exhaust mechanism portion 301 has a flow channel depth continuously constant with a predetermined depth H2, and the Siegbahn type exhaust mechanism portion 201 has regions being constant with the predetermined depth H2 from a predetermined position.
Inventors:
SUZUKI HARUKI (JP)
Application Number:
PCT/JP2021/040017
Publication Date:
May 12, 2022
Filing Date:
October 29, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2017002783A | 2017-01-05 | |||
| JP2005030209A | 2005-02-03 | |||
| JP2015017611A | 2015-01-29 | |||
| JP6228839B2 | 2017-11-08 | |||
| JP6353195B2 | 2018-07-04 | |||
| JPH0316560B2 | 1991-03-05 | |||
| JP2013217226A | 2013-10-24 |
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