Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/210118
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump suitable for achieving reduction of the cost of a vacuum pump and simplification of temperature control. [Solution] A vacuum pump 100 comprises: a base part 129; a rotor 103 which is disposed on the base part; a support means (magnetic bearing) which supports the rotor in a manner allowing rotation about the axial center thereof; a driving means (motor 121) which drives rotation of the rotor about the axial center thereof; a gas flow path which leads gas that has been taken in due to rotation of the rotor to an outlet 133; a multifunctional stationary component 301; and a thermal insulation means 305. The multifunctional stationary component 301 has the function of constituting an exhaust side gas flow path among the entire gas flow path, and the function of temperature adjustment being operable with a configuration comprising a temperature sensor S, a heating means H, and a first cooling means C1. Temperature is adjusted via the function of temperature adjustment. The thermal insulation means 305 thermally insulates the multifunctional stationary component from other components.
Inventors:
MIWATA TOORU (JP)
SHI YONGWEI (JP)
SAKAGUCHI YOSHIYUKI (JP)
SHI YONGWEI (JP)
SAKAGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2022/013249
Publication Date:
October 06, 2022
Filing Date:
March 22, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2020012423A | 2020-01-23 | |||
| JPH07174099A | 1995-07-11 | |||
| JP2019178655A | 2019-10-17 | |||
| JP2021042722A | 2021-03-18 |
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