Title:
VACUUM PUMPING DEVICE, VACUUM PROCESSING DEVICE, AND VACUUM PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/055665
Kind Code:
A1
Abstract:
Provided are a vacuum pumping device, a vacuum processing device, and a vacuum pumping method capable of preventing accumulation of ozone in a cryopump. A vacuum processing device (1) pertaining to an embodiment of the invention is equipped with a processing chamber (11) for vacuum processing, a pump unit for exhausting the processing chamber (11), and a heating unit (20). The pump unit has a cold trap (161) capable of collecting the exhaust gas and an exhaust pathway (13A) for leading the exhaust gas from the processing chamber (11) to the cold trap (161). The heating unit (20) pyrolyzes ozone contained in the exhaust gas while it is in the exhaust pathway (13A) on the way to the cold trap (161) from the processing chamber (11).
Inventors:
KOMURO TAKU (JP)
MASUDA YUKIO (JP)
FURUYA SHINJI (JP)
SAITO KAZUYA (JP)
OSONO SHUJI (JP)
ASARI SHIN (JP)
MASUDA YUKIO (JP)
FURUYA SHINJI (JP)
SAITO KAZUYA (JP)
OSONO SHUJI (JP)
ASARI SHIN (JP)
Application Number:
PCT/JP2009/006050
Publication Date:
May 20, 2010
Filing Date:
November 12, 2009
Export Citation:
Assignee:
ULVAC CRYOGENICS INC (JP)
ULVAC INC (JP)
KOMURO TAKU (JP)
MASUDA YUKIO (JP)
FURUYA SHINJI (JP)
SAITO KAZUYA (JP)
OSONO SHUJI (JP)
ASARI SHIN (JP)
ULVAC INC (JP)
KOMURO TAKU (JP)
MASUDA YUKIO (JP)
FURUYA SHINJI (JP)
SAITO KAZUYA (JP)
OSONO SHUJI (JP)
ASARI SHIN (JP)
International Classes:
F04B37/16; F04B37/08; F04B37/18
Foreign References:
| JPH10184541A | 1998-07-14 | |||
| JPH11509692A | 1999-08-24 | |||
| JPH11286773A | 1999-10-19 | |||
| JP2000024456A | 2000-01-25 | |||
| JP2004136215A | 2004-05-13 |
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
Omori Junichi (JP)
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