Title:
VACUUM PUMPING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/141725
Kind Code:
A3
Abstract:
Vacuum pumping system (10) for evacuating a vacuum chamber (12), the system comprising: a vacuum pump (16); and a plurality of forelines (22, 24) for conveying gas to the vacuum pump (16) wherein in a first low vacuum stage of chamber evacuation a first foreline arrangement (22) can be connected for conveying gas to the vacuum pump (16) and in a second higher vacuum stage of chamber evacuation a second foreline arrangement (22, 24) comprising one or more of said forelines can be connected for conveying gas to the vacuum pump (16), wherein the second foreline arrangement has a total cross-sectional area for conveying fluid which is larger than a total cross-sectional area of the first foreline arrangement.
Inventors:
GALTRY MICHAEL ANDREW (GB)
TURRELL DAVID ALAN (GB)
TURRELL DAVID ALAN (GB)
Application Number:
PCT/GB2011/050651
Publication Date:
July 11, 2013
Filing Date:
March 30, 2011
Export Citation:
Assignee:
EDWARDS LTD (GB)
GALTRY MICHAEL ANDREW (GB)
TURRELL DAVID ALAN (GB)
GALTRY MICHAEL ANDREW (GB)
TURRELL DAVID ALAN (GB)
International Classes:
F04C25/02; F04B37/14
Foreign References:
| US5228838A | 1993-07-20 | |||
| EP1367260A2 | 2003-12-03 |
Attorney, Agent or Firm:
CLARK, Charles, Robert (Manor Royal, Crawley Sussex RH10 9LW, GB)
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