Title:
VACUUM TREATMENT APPARATUS AND VAPOR DEPOSITION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2005/025735
Kind Code:
A1
Abstract:
It has been found that an organic component is emitted from a member such as a crucible or a gasket constituting an apparatus for vacuum treatment and an element is contaminated with said organic component emitted, and, as a result, members of the apparatus for vacuum treatment are subjected to a treatment for reducing the emission of an organic component. For example, a crucible is made from a material having a reduced catalytic activity to a material for use in the vapor deposition in question and a gasket is used after a treatment for reducing the bleeding of an organic component or is made from a material containing a reduced amount of an organic component.
Inventors:
OHMI TADAHIRO (JP)
SHIRAI YASUYUKI (JP)
MORIMOTO AKIHIRO (JP)
SHIRAI YASUYUKI (JP)
MORIMOTO AKIHIRO (JP)
Application Number:
PCT/JP2004/012239
Publication Date:
March 24, 2005
Filing Date:
August 19, 2004
Export Citation:
Assignee:
OHMI TADAHIRO (JP)
SHIRAI YASUYUKI (JP)
MORIMOTO AKIHIRO (JP)
SHIRAI YASUYUKI (JP)
MORIMOTO AKIHIRO (JP)
International Classes:
B01J3/00; B01J3/02; C23C14/24; C23C14/56; H01L51/50; H05B33/10; (IPC1-7): B01J3/00; B01J3/02; H05B33/10; H05B33/14; C23C14/00; C23C14/24
Foreign References:
| JP2002310302A | 2002-10-23 | |||
| JPH11201288A | 1999-07-27 | |||
| JPH06107803A | 1994-04-19 | |||
| JPH09189290A | 1997-07-22 | |||
| JPH08321448A | 1996-12-03 |
Attorney, Agent or Firm:
Goto, Yosuke (4-10 Nishishinbashi 1-chom, Minato-ku Tokyo 03, JP)
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