Title:
VACUUM TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/013363
Kind Code:
A1
Abstract:
A vacuum treatment apparatus is provided with a plurality of carriers whereupon a base material is mounted; a circulation path which is held in a controlled atmosphere and permits the carriers to circulate therein; a plurality of base material exit/entrance chambers arranged in the circulation path for loading and taking out the base material on and from the carriers; and vacuum treatment chambers which are arranged between the base material exit/entrance chambers in the circulation path and perform vacuum treatment to the base material.
Inventors:
IIJIMA EIICHI (JP)
Application Number:
PCT/JP2006/314454
Publication Date:
February 01, 2007
Filing Date:
July 21, 2006
Export Citation:
Assignee:
ULVAC INC (JP)
IIJIMA EIICHI (JP)
IIJIMA EIICHI (JP)
International Classes:
C23C14/56
Foreign References:
| JP2002176090A | 2002-06-21 | |||
| JPH0896358A | 1996-04-12 | |||
| JP2002288888A | 2002-10-04 | |||
| JPH06340968A | 1994-12-13 |
Attorney, Agent or Firm:
SHIGA, Masatake et al. (Yaesu Chuo-k, Tokyo 53, JP)
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