Title:
VACUUM TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/105967
Kind Code:
A3
Abstract:
A transport arrangement (100) for bi-directionally transporting substrates towards and from a load lock (5) comprises a first substrate handler (1) swivelable about a first axis (A1) and with at least two first substrate carriers (1a, 1b). A second substrate handler (20) swivelable about a second axis (A20) comprises at least four second substrate carriers (20a to 20d). First and second substrate carriers are mutually aligned respectively in one position of their respective swiveling trajectory paths as one of the first substrate carriers is aligned with one of the second substrate carriers and the other of the first substrate carriers is aligned with the load lock (5). The first substrate carriers (1a, 1b) are movable towards and from the load lock (5) once aligned there with and thereby form respectively external valves of the load lock (5).
Inventors:
VOSER STEPHAN (CH)
DOVIDS GERHARD (CH)
DOVIDS GERHARD (CH)
Application Number:
PCT/EP2010/053140
Publication Date:
May 26, 2011
Filing Date:
March 11, 2010
Export Citation:
Assignee:
OC OERLIKON BALZERS AG (LI)
VOSER STEPHAN (CH)
DOVIDS GERHARD (CH)
VOSER STEPHAN (CH)
DOVIDS GERHARD (CH)
International Classes:
H01L21/677; H01L21/00
Domestic Patent References:
| WO2007126289A1 | 2007-11-08 | |||
| WO2007129838A1 | 2007-11-15 | |||
| WO2002023597A2 | 2002-03-21 |
Foreign References:
| JP2008153353A | 2008-07-03 | |||
| JP2008013851A | 2008-01-24 |
Attorney, Agent or Firm:
TROESCH SCHEIDEGGER WERNER AG (Schwäntenmos 14, Zumikon, CH)
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