Title:
VACUUM ULTRAVIOLET LAMP OF 2650 KHZ RADIO FREQUENCY INDUCTION TYPE
Document Type and Number:
WIPO Patent Application WO/2023/060894
Kind Code:
A1
Abstract:
A vacuum ultraviolet lamp of 2650 kHz radio frequency induction type, the vacuum ultraviolet lamp being composed of a 2650 kHz radio frequency generator (2), a radio frequency coupler aluminum alloy rod (4), a vacuum ultraviolet lamp aluminum alloy base (5), a hollow columnar high-temperature glass bulb (6), an excitation coil (7), a ferrite core (8), and a window sheet (9) that can transmit vacuum ultraviolet light. The radio frequency coupler aluminum alloy rod (4), the excitation coil (7) and the ferrite core (8) constitute a radio frequency coupler. The vacuum ultraviolet light is generated by combining a 2650 kHz radio frequency with magnetic conductive material coupling technology. The 2650 kHz radio frequency generator (2) and the radio frequency coupler are a radio frequency generator and a coupler of a commercial lighting electrodeless lamp. 30 Pa to 300 Pa of argon, krypton, xenon, or a gas mixture of argon, krypton or xenon with helium is sealed in the hollow columnar high-temperature glass bulb (6). The 2650 kHz radio frequency generator (2) generates a radio frequency current; the radio frequency current flows through the excitation coil (7) wound around the ferrite core (8) to generate an induced magnetic field to excite an inert gas in the bulb (6) to form plasma discharge; and vacuum ultraviolet light generated by plasma is output through the window sheet (9) that can transmit the vacuum ultraviolet light.
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Inventors:
SHU JINIAN (CN)
YANG BO (CN)
ZHANG ZUOJIAN (CN)
YANG BO (CN)
ZHANG ZUOJIAN (CN)
Application Number:
PCT/CN2022/093725
Publication Date:
April 20, 2023
Filing Date:
May 19, 2022
Export Citation:
Assignee:
UNIV CAS (CN)
International Classes:
H01J61/30
Foreign References:
| CN201425934Y | 2010-03-17 | |||
| CN201355604Y | 2009-12-02 | |||
| CN102664135A | 2012-09-12 | |||
| CN102324379A | 2012-01-18 | |||
| CN103325660A | 2013-09-25 | |||
| CN112635294A | 2021-04-09 |
Attorney, Agent or Firm:
QINGDAO FIRST PATENT & TRADEMARK AGENT CO., LTD. (CN)
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