Title:
VACUUM VALVE EQUIPPED WITH CIRCULAR TUBE-TYPE INFLECTED BARRIER FILM
Document Type and Number:
WIPO Patent Application WO/2022/065527
Kind Code:
A1
Abstract:
The present invention relates to a vacuum valve equipped with a circular tube-type inflected barrier film, wherein the accumulation of exhaust gas powder can be minimized while effectively blocking exhaust gas passing through a valve body unit, so that the exhaust gas does not enter a valve driving unit. The vacuum valve comprises a barrier film which is installed in a body chamber of a valve body so as to block a slit of a piston rod through-hole formed between the valve body and a valve power unit so as to allow a piston rod to pass through, and prevents the exhaust gas that has flowed into the body chamber from entering the valve power unit via the slit of a piston rod through-hole. The barrier film is formed as a hollow circular tube-type body so as to surround the piston rod, and the upper end of the barrier film is coupled, in a form surrounding the piston rod through-hole, to a ceiling part of the body chamber. The lower end of the barrier film is bent inward to form a bent section and coupled to the upper end of an opening/closing member, and ascends and descends along with the opening/closing member while displacing the bent section when the piston rod and the opening/closing member ascend and descend.
Inventors:
NA MYUNG SOO (KR)
Application Number:
PCT/KR2020/012770
Publication Date:
March 31, 2022
Filing Date:
September 22, 2020
Export Citation:
Assignee:
MST CO LTD (KR)
International Classes:
F16K51/02; F16K1/34; F16K25/00; F16K49/00; H01L21/67
Foreign References:
| KR101408008B1 | 2014-07-02 | |||
| KR101129709B1 | 2012-03-28 | |||
| KR20090023146A | 2009-03-04 | |||
| JP2015068438A | 2015-04-13 | |||
| US20190271410A1 | 2019-09-05 |
Attorney, Agent or Firm:
OH, Wihwan (KR)
Download PDF: