Title:
VALVE ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2019/074340
Kind Code:
A1
Abstract:
The present invention relates to a valve assembly wherein the same can be easily installed in an exhaust line of a vacuum chamber, a valve constituting a part of the exhaust line is moved horizontally such that process contaminants and byproducts flowing into a gate valve can be blocked completely, and the same has an excellent exhaust effect. A valve assembly according to the present invention comprises: a valve housing installed such that, after removing a part of a vacuum chamber exhaust line, the valve housing is inserted into the removed part of the exhaust line, the valve housing being open in a communication direction of the exhaust line and having a predetermined inner space in a direction perpendicular to the communication direction; a valve installed inside the valve housing to be able to move horizontally and configured to allow the exhaust line to communicate or to block the same while moving horizontally inside the valve housing; a valve driving portion installed on one side of the valve housing and connected to the valve so as to horizontally move the valve in a direction perpendicular to the exhaust line; and a valve movement guide portion installed inside the valve housing so as to guide the path of movement of the valve.
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Inventors:
JOH GIL YOUNG (KR)
KIM JONG HAK (KR)
KIM JONG HAK (KR)
Application Number:
PCT/KR2018/012113
Publication Date:
April 18, 2019
Filing Date:
October 15, 2018
Export Citation:
Assignee:
LAON TMD CO LTD (KR)
International Classes:
F16K3/18; F16K3/02; F16K3/314; F16K27/04; F16K49/00; F16K51/02
Foreign References:
| KR20110097395A | 2011-08-31 | |||
| KR100544299B1 | 2006-01-23 | |||
| KR100952115B1 | 2010-04-13 | |||
| KR100779241B1 | 2007-11-23 | |||
| JP2014129879A | 2014-07-10 |
Attorney, Agent or Firm:
KIM, Ha Gi (KR)
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