VALVE DEVICE, FLUID CONTROL DEVICE, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING DEVICE, AND SEMICONDUCTOR MANUFACTURING METHOD

Title:

VALVE DEVICE, FLUID CONTROL DEVICE, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING DEVICE, AND SEMICONDUCTOR MANUFACTURING METHOD

Document Type and Number:

WIPO Patent Application WO/2019/193978

Kind Code:

A1

Abstract:

Provided is a valve device with which a large flow rate can be controlled in a more stable manner. This valve device (1) comprises: a valve body (2) forming a first flow path (21) and a second flow path (22); an inner disc (3) having an inside annular section (32) arranged around an opening of the first flow path, an outside annular section (31) arranged on the outer circumferential side of the inside annular section, and a connecting section (37) connecting the inside annular section and the outside annular section; a valve seat (48) arranged on the inside annular section; a diaphragm (41) a peripheral edge portion of which contacts the outside annular section, and which moves between an open position in which the valve seat is not contacted and a closed position in which the valve seat is contacted, thereby forming/shutting off a connection between the first flow path and the second flow path; and an adapter (43) which makes contact with the peripheral edge portion of the diaphragm and sandwiches the peripheral edge portion between the adapter and the outside annular section. The position of an outermost side of a diaphragm contact surface where the outside annular section contacts the diaphragm is on the outside of the position of an innermost side of a body contact surface where the outside annular section contacts a valve body at a surface perpendicular to the axial direction.

Inventors:

SATO TATSUHIKO (JP)
SHINOHARA TSUTOMU (JP)
NAKATA TOMOHIRO (JP)
MIURA TAKERU (JP)

Application Number:

PCT/JP2019/011742

Publication Date:

October 10, 2019

Filing Date:

March 20, 2019

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJIKIN KK (JP)

International Classes:

F16K7/16

Foreign References:

JPH06193747A	1994-07-15
US5485984A	1996-01-23
JP2016505125A	2016-02-18
JP2016011744A	2016-01-21
JP2005172026A	2005-06-30
US20050109967A1	2005-05-26
JPH0229361U	1990-02-26