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Title:
VALVE DEVICE, FLUID CONTROL DEVICE, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING DEVICE, AND SEMICONDUCTOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/193978
Kind Code:
A1
Abstract:
Provided is a valve device with which a large flow rate can be controlled in a more stable manner. This valve device (1) comprises: a valve body (2) forming a first flow path (21) and a second flow path (22); an inner disc (3) having an inside annular section (32) arranged around an opening of the first flow path, an outside annular section (31) arranged on the outer circumferential side of the inside annular section, and a connecting section (37) connecting the inside annular section and the outside annular section; a valve seat (48) arranged on the inside annular section; a diaphragm (41) a peripheral edge portion of which contacts the outside annular section, and which moves between an open position in which the valve seat is not contacted and a closed position in which the valve seat is contacted, thereby forming/shutting off a connection between the first flow path and the second flow path; and an adapter (43) which makes contact with the peripheral edge portion of the diaphragm and sandwiches the peripheral edge portion between the adapter and the outside annular section. The position of an outermost side of a diaphragm contact surface where the outside annular section contacts the diaphragm is on the outside of the position of an innermost side of a body contact surface where the outside annular section contacts a valve body at a surface perpendicular to the axial direction.

Inventors:
SATO Tatsuhiko (3-2 Itachibori 2-chome, Nishi-k, Osaka-city Osaka 12, 〒5500012, JP)
SHINOHARA Tsutomu (3-2 Itachibori 2-chome, Nishi-k, Osaka-city Osaka 12, 〒5500012, JP)
NAKATA Tomohiro (3-2 Itachibori 2-chome, Nishi-k, Osaka-city Osaka 12, 〒5500012, JP)
Miura Takeru (3-2 Itachibori 2-chome, Nishi-k, Osaka-city Osaka 12, 〒5500012, JP)
Application Number:
JP2019/011742
Publication Date:
October 10, 2019
Filing Date:
March 20, 2019
Export Citation:
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Assignee:
FUJIKIN INCORPORATED (3-2 Itachibori 2-chome, Nishi-ku Osaka-city Osaka, 12, 〒5500012, JP)
International Classes:
F16K7/16
Foreign References:
JPH06193747A1994-07-15
US5485984A1996-01-23
JP2016505125A2016-02-18
JP2016011744A2016-01-21
JP2005172026A2005-06-30
US20050109967A12005-05-26
JPH0229361U1990-02-26
Attorney, Agent or Firm:
KEN IP LAW FIRM (6-1-4-905, Takasu Urayasu-city Chiba, 23, 〒2790023, JP)
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