Title:
VALVE ELEMENT, VALVE, SELECTOR VALVE, AND TRAP DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/132318
Kind Code:
A1
Abstract:
A valve element, a valve, a selector valve, and a trap device. When a fluid flows in the first flow passage (11a) of the valve (1), an operating plate (5a) is slidably moved by leading air from an air lead-in passage (35a) into an air cylinder (3a) to drive a shaft (4a) so as to move a sealing plate (6a) backward until the second sealing surface (8a) of the sealing plate (6a) is brought into contact with a wall (13a). An air cylinder (3b) is advanced to such a position that the first sealing surface (7b) of a sealing plate (6b) is brought into contact with a wall (12b) to seal an opening (14b).
Inventors:
TSUDA EINOSUKE (JP)
Application Number:
PCT/JP2006/311518
Publication Date:
December 14, 2006
Filing Date:
June 08, 2006
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
TSUDA EINOSUKE (JP)
TSUDA EINOSUKE (JP)
International Classes:
F16K11/044; B01D8/00; B01J3/00; B01J3/02; F16K1/36; F16K37/00; F16K49/00; H01L21/205; H01L21/3065
Foreign References:
| JPH0233863Y2 | 1990-09-11 | |||
| JPS4983874A | 1974-08-12 | |||
| JP2001235576A | 2001-08-31 | |||
| JPH0419263Y2 | 1992-04-30 | |||
| JP2003278942A | 2003-10-02 | |||
| JPS5929476U | 1984-02-23 | |||
| JP2005140260A | 2005-06-02 | |||
| JPH09112733A | 1997-05-02 | |||
| JP2004111834A | 2004-04-08 |
Attorney, Agent or Firm:
Takayama, Hiroshi (Daiichi Shinwa Building 10-8, Akasaka 2-chom, Minato-ku Tokyo, JP)
Download PDF:
Previous Patent: LIQUID CRYSTAL DISPLAY ELEMENT
Next Patent: GLASS ARTICLE WITH CONDUCTIVE FILM FORMED THEREON AND METHOD FOR MANUFACTURING SAME
Next Patent: GLASS ARTICLE WITH CONDUCTIVE FILM FORMED THEREON AND METHOD FOR MANUFACTURING SAME