Title:
VALVE, FLUID-CONTROLLING STRUCTURE, FLUID DEVICE, AND METHOD FOR MANUFACTURING VALVE
Document Type and Number:
WIPO Patent Application WO/2015/083829
Kind Code:
A1
Abstract:
A valve (1) installed in a flow channel (21) is provided with a substrate (10) in which a hole (2) having an opening is provided in a first surface (10a), and a diaphragm member (4) secured to at least part of a wall surface (3a) of the hole (2) and having at least a middle part (4p) in the shape of a thin film, the flow of fluid in the flow channel (21) being suppressed by deformation of the diaphragm member (4).
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Inventors:
ICHIKI TAKANORI (JP)
KOBAYASHI MASASHI (JP)
TERANE SHOTARO (JP)
SUZUKI KUNO (JP)
KOBAYASHI MASASHI (JP)
TERANE SHOTARO (JP)
SUZUKI KUNO (JP)
Application Number:
PCT/JP2014/082283
Publication Date:
June 11, 2015
Filing Date:
December 05, 2014
Export Citation:
Assignee:
UNIV TOKYO (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
F16K7/17
Foreign References:
JP2002508491A | 2002-03-19 | |||
JP2009510337A | 2009-03-12 | |||
JP2008106889A | 2008-05-08 | |||
JP2011510309A | 2011-03-31 | |||
JP2012508577A | 2012-04-12 |
Other References:
See also references of EP 3078889A4
ZHANG W ET AL.: "PMMA/PDMS Valves and Pumps for Disposable Microfluidics", LAB CHIP., vol. 9, no. 21, 7 November 2009 (2009-11-07), pages 3088 - 3094
ZHANG W ET AL.: "PMMA/PDMS Valves and Pumps for Disposable Microfluidics", LAB CHIP., vol. 9, no. 21, 7 November 2009 (2009-11-07), pages 3088 - 3094
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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