VALVE AND FLUID SUPPLY LINE

WIPO Patent Application WO/2019/065048

A1

The present invention improves the accuracy of material gas control by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve (V) comprises: a valve body (3); and a drive pressure control device (4) that is connected to the valve body (3). The drive pressure control device (4) includes: a first drive pressure introduction passage (431) that is connected to a drive pressure supply source (G) outside the line; a first automatic valve (411) that opens/closes the first drive pressure introduction passage (431); a second drive pressure introduction passage (433) that is connected to a drive pressure introduction port (3a) of the valve body (3); a second automatic valve (412) that opens/closes the second drive pressure introduction passage (433) in conjunction with the first automatic valve (411), and that opens/closes an exhaust passage (44) which exhausts drive pressure from the second drive pressure introduction passage (433); and a third drive pressure introduction passage (432) that connects, via the first automatic valve (411) and the second automatic valve (412), the first drive pressure introduction passage (431) and the second drive pressure introduction passage (433).

TANNO RYUTARO (JP)
AIKAWA KENJI (JP)
HARADA AKIHIRO (JP)
SUZUKI YUYA (JP)
MATSUDA TAKAHIRO (JP)
KOMEHANA KATSUNORI (JP)
OCHIISHI MASAHIKO (JP)
SHINOHARA TSUTOMU (JP)

PCT/JP2018/031754

April 04, 2019

August 28, 2018

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FUJIKIN KK (JP)

F16K31/12; F16K27/00

WO2017033757A1

2017-03-02

JPH01126481A	1989-05-18
JP2007515726A	2007-06-14
JP2003529218A	2003-09-30
JP2006319190A	2006-11-24
JP2004316837A	2004-11-11
JP2012033188A	2012-02-16
JP2008286812A	2008-11-27
JPH1182763A	1999-03-26

KASUKAWA Toshio (JP)

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