Title:
VALVE SYSTEM, DIAPHRAGM VALVE OUTPUT MONITORING METHOD AND OUTPUT ADJUSTMENT METHOD, AND SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/199836
Kind Code:
A1
Abstract:
Provided is a valve system that is capable of monitoring, in real time, the mass of gas supplied from a periodically opening and closing valve, and that is capable of adjusting the output mass of gas supplied from the valve so as to approach a target mass. A main actuator (60) is operated such that a diaphragm periodically opens and closes a flow passage, an output mass that is output from a diaphragm valve after passing through a gap between the diaphragm and a valve seat is calculated on the basis of displacement data detected by a displacement sensor, an adjustment lift amount is determined on the basis of the calculated output mass, and a lift amount (Lf) of the diaphragm (20) is adjusted using the determined adjustment lift amount.
Inventors:
YOSHIDA TOSHIHIDE (JP)
SHINOHARA TSUTOMU (JP)
NAKATA TOMOHIRO (JP)
TANNO RYUTARO (JP)
SUZUKI YUYA (JP)
SHINOHARA TSUTOMU (JP)
NAKATA TOMOHIRO (JP)
TANNO RYUTARO (JP)
SUZUKI YUYA (JP)
Application Number:
PCT/JP2021/007694
Publication Date:
October 07, 2021
Filing Date:
March 01, 2021
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K7/16; F16K31/02; F16K37/00
Domestic Patent References:
| WO2018079173A1 | 2018-05-03 |
Foreign References:
| JP2008169904A | 2008-07-24 | |||
| JP2015224621A | 2015-12-14 |
Attorney, Agent or Firm:
KEN IP LAW FIRM (JP)
Download PDF:
Previous Patent: SANITARY WARE
Next Patent: DATA FORMAT CONVERTER, MARITIME NAVIGATION SYSTEM, DATA FORMAT CONVERSION METHOD, AND DATA FORMAT CO...
Next Patent: DATA FORMAT CONVERTER, MARITIME NAVIGATION SYSTEM, DATA FORMAT CONVERSION METHOD, AND DATA FORMAT CO...