Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VALVE AND VACUUM PROCESSING DEVICE WITH THE VALVE
Document Type and Number:
WIPO Patent Application WO/2000/075544
Kind Code:
A1
Abstract:
A valve (10), comprising a valve main body (11) which has an opening (11A) and forms a space forming a part of a gas flow path; a first valve disc (12) for opening and closing the opening (11A); and a drive mechanism (40) which moves the first valve disc (12) between a close position to close the opening (11A) and an open position to open the opening (11A), the drive mechanism (40) further comprising a seal mechanism (15) and a second valve disc (17); the seal mechanism (15) comprising a rod (14) drivingly moved forward and backward, wherein the end part of the rod (14) is extended into the valve main body (11) through a through hole (11B) and connected to the first valve disc (12), the first valve disc (12) is moved between the close position and the open position by the forward and backward driving movement of the rod (14) and leads into the valve main body (11) through the through hole (11B), and a drive mechanism (40) side is shielded air-tight from the valve main body; the second valve disc (17) being installed on the rod (14), moving according to the forward and backward driving movement of the rod (14), and closing the through hole (11B) when the first valve disc (12) is positioned at the open position or the close position so as to shut off the seal mechanism (15) from the valve main body (11).

More Like This:
JP6683828Spring-loaded gate valve
WO/2015/157755SAFETY SYSTEMS FOR ISOLATING OVERPRESSURE DURING PRESSURIZED FLUID OPERATIONS
Inventors:
IWATA TERUO (JP)
Application Number:
PCT/JP2000/003539
Publication Date:
December 14, 2000
Filing Date:
June 01, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKYO ELECTRON LTD (JP)
IWATA TERUO (JP)
International Classes:
F16K3/02; F16K31/122; F16K41/10; (IPC1-7): F16K41/10; F16K3/02; F16K51/02
Foreign References:
JPS57107079U1982-07-01
JPH0637674U1994-05-20
JPH07335711A1995-12-22
JPH0276281U1990-06-12
JPS61130686A1986-06-18
US4721282A1988-01-26
US4681329A1987-07-21
Other References:
See also references of EP 1215430A4
Attorney, Agent or Firm:
Suzuye, Takehiko (Kasumigaseki 3-chome Chiyoda-ku, Tokyo, JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: CLOSURE ELEMENT FOR AN ASEPTIC DOUBLE-SEAT VALVE

Next Patent: RECTANGULAR HEAT EXCHANGER TUBE WITH INNER STUDS